Microstructural analysis of nanostructured Zn O thin films
DOI:
https://doi.org/10.15381/rif.v23i2.20297Keywords:
reactive magnetron sputtering, ZnO thin film, SEM, XRR, XRDAbstract
We present the experimental results obtained from microstructural analysis of ZnO thin lms with
20, 50, and 100 nm in thickness, grown onto the commercial glass substrate by reactive sputtering.
We analyze the quantitative information on the size of the crystalline domains, the texture direction
of the nanocolumns, their densities, thicknesses, surface and interface roughness obtained through
characterization techniques such as scanning electron microscope (SEM), X-ray reectivity (XRR)
and X-ray diraction (DRX).
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Copyright (c) 2020 María Urbina, Juan Gonzalez
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